คำอธิบาย
Features
High accuracy& High throughput
Highest rotation accuracy in this class: 0.01 μm.
Centering and tilting within 60 second. It realize high efficiency and save total measuring time.
Robust high accuracy and high rigidity structure
Gabbro with minimal susceptibility to age-related deteriorationis used in the column, base and arm which guarantee topclass high accuracy over time.
Built-In Vibration Isolatio
